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The consultant has performed comprehensive industrial hygiene sampling during normal processing, routine maintenance, and special investigation activities at numerous semiconductor manufacturing and assembly facilities. A typical project includes development of a detailed sample collection plan based on process information, predictive by-product chemistry, and potential exposures. Company then assembles a matrix of operations, equipment, and materials to prioritize monitoring activities. Hazard analyses are used to determine “worst case” scenarios to sample for each compound of concern. Sample collection and analyses are performed in accordance with the most appropriate National Institute of Occupational Safety and Health (NIOSH), Occupational Safety and Health Administration (OSHA), or other applicable methods. Surface wipe samples are collected in accordance with OSHA guidance, where applicable, and are analyzed using the most appropriate NIOSH or OSHA method. Exposure assessments also include Best Industry Practices review of process tools and procedural exposure controls. Results and prioritized recommendations are provided to the client in a manner that facilitates communication to employees.